Wiring structure, semiconductor device and manufacturing method thereof

ABSTRACT

A semiconductor device manufacturing method for manufacturing a semiconductor device having a transistor mounted in a wiring of a plural-layer structure includes in manufacturing the semiconductor device that is formed on a semiconductor element and includes a barrier insulating film, a porous interlayer insulating film, a wiring, a via plug formed by embedding a metal wiring material in a wiring trench, and a via hole formed in the porous interlayer insulating film, irradiating an electron beam or an ultraviolet ray onto at least a portion of the porous interlayer insulating film before forming an opening in the barrier insulating film.

The present application is a Divisional Application of U.S. patentapplication Ser. No. 11/991,939, filed on Mar. 13, 2008, which is basedon and claims priority from International Application No.PCT/JP2006/318799, which is based on and claims priority from JapanesePatent Application Nos. 2006-198752 and 2005-270355, filed on Jul. 20,2006 and Sep. 16, 2005, respectively, the entire contents of which areincorporated herein by reference.

TECHNICAL FIELD

This invention relates to a semiconductor device and a manufacturingmethod thereof and, in particular, relates to a wiring structure formingmultilayer wiring (plural-layer wiring), a semiconductor device and itsmanufacturing method.

BACKGROUND ART

Following high integration and miniaturization of semiconductor elementsin recent years, there has been developed a semiconductor device using,as a wiring interlayer insulating film (hereinafter referred to as aninterlayer insulating film), an insulating film having a permittivitylower than that of a conventional silicon oxide film. For example, therehave been developed an interlayer insulating film obtained bysubstituting a part of oxygen atoms contained in a silicon oxide film byfluorine, hydrogen, or a chemical species containing carbon andhydrogen, such as a methyl group, and an interlayer insulating filmobtained by forming fine pores in one of those films to achieve areduction in permittivity. Particularly, the porous interlayerinsulating film introducing the fine pores is quite effective forreducing the permittivity and thus can reduce the parasitic capacitancein multilayer wiring. In view of this, the multilayer wiring with porousinterlayer insulating films introduced therein is expected to be widelyapplied to supercomputers and digital home appliances requiring highcalculation speeds, mobile devices such as portable telephones requiringlow power consumption, and so on.

FIG. 30 shows a multilayer wiring manufacturing method using porousinterlayer insulating films according to a prior art. On a Cu wiringlayer (not shown) formed in advance, a barrier insulating film 1 of SiCNor the like having diffusion barrier properties to Cu, a via interlayerinsulating film 2, an etching stopper 3 of SiO₂ or the like, a wiringinterlayer insulating film 4, and a hard mask 5 of SiO₂ or the like arestacked in the order named (FIG. 30, (a)). Then, as shown in FIG. 30,(b), dual-damascene trenches each comprising a wiring trench 6 and a viahole 7 are formed using photoresists and reactive etching.Dual-damascene trench forming methods include a via-first process inwhich a via is first formed and then a photoresist is coated over theformed via to thereby form a wiring trench and a trench-first process inwhich a wiring trench is first formed and then a photoresist is coatedover the formed wiring trench to thereby form a via hole. Then, as shownin FIG. 30, (c), after etch-back of the barrier insulating film 1 at thebottom of the via holes 7, a barrier metal 10 of Ta/TaN or the like isdeposited on the inner walls of the openings and the entire surface ofthe hard mask 5 and then a Cu film 11 is deposited thereon by anelectrolytic plating method. The excess portions, deposited on the hardmask, of the barrier metal and the Cu film are removed and flattened bya CMP (Chemical Mechanical Polishing) process (FIG. 30, (d)).

With respect to the multilayer wiring structure using porous interlayerinsulating films, various problems on the process and device reliabilityhave been actualized and there have been many proposals for overcomingthem.

For example, as shown in FIG. 31, with respect to the side wall of theporous interlayer insulating film 23 (the via interlayer insulating film2 or the wiring interlayer insulating film 4) after the formation of theopening by the etching, the coating and adhesion of the barrier metal 10are lowered due to the influence of exposed pore portions 19. Thiscauses degradation of the device properties due to diffusion of water,various process gases, or Cu. For this problem, in Japanese UnexaminedPatent Application Publication (JP-A) No. 2004-193326 (Patent Document1), pores exposed on the side wall of a wiring trench after etching areblocked by nonporous polyarylether to improve the coating of a barriermetal, thereby suppressing diffusion of Cu into a porous interlayerinsulating film. Similarly, in Japanese Unexamined Patent ApplicationPublication (JP-A) No. 2001-85522 (Patent Document 2), an atomic groupbulkier than a hydroxyl group is impregnated into pores exposed on theside wall of a porous interlayer insulating film after etching, therebysuppressing the flow of metal, water, or gas into the film through thepores.

Japanese Unexamined Patent Application Publication (JP-A) No.2000-183052 (Patent Document 3) describes, as a technique for increasingthe adhesion between an interlayer insulating film and an underlyingsubstrate, a manufacturing method that applies a physical impact, i.e.reverse sputtering, to the lower-layer substrate for the interlayerinsulating film to form dangling bonds on the surface of the underlyingsubstrate, thereby improving the adhesion thereof to the interlayerinsulating film formed thereon. Further, the Patent Document 3describes, as an adhesion improving method, a method of inserting asilicon oxide film or a silicon nitride film as an adhesive layerbetween an interlayer insulating film and an underlying substrate.

Japanese Unexamined Patent Application Publication (JP-A) No. 2005-79307(Patent Document 4) discloses a porous interlayer insulating filmmanufacturing method that bakes a coated film by irradiating an electronbeam for the purpose of strengthening the porous interlayer insulatingfilm. In the above Patent Document 4, a film strength (elastic modulus)of 15 GPa is achieved in a porous interlayer insulating film having apore size of about 1.5 nm.

DISCLOSURE OF THE INVENTION Problem to be Solved by the Invention

However, semiconductor devices formed by these prior arts have thefollowing problems.

The first problem is diffusion of water, etching gas, or metal into aporous interlayer insulating film. Water is a molecule with an extremelyhigh polarizability (relative permittivity is about 70) and, therefore,if taken into the film through pores, the permittivity largelyincreases. If a fluorine-based etching gas permeates into the film, itreacts with water or the like in the film to form hydrogen fluoride sothat large voids are formed in the porous interlayer insulating film, orit is released again after wiring formation to cause corrosion of ametal wiring material such as Cu. Further, if a metal such as Cu isdiffused into the interlayer insulating film through pores, it causesdegradation of the wiring reliability such as an increase in leakagecurrent.

The Patent Documents 1 and 2 are conceived for solving these problems.In the prior art described in the Patent Document 1, since the poresexposed on the side wall of the trench after the etching are blocked bythe nonporous polyarylether, it is effective for improving the coatingof the barrier metal. However, such an embedded material is poor inadhesion to the barrier metal and, thus, as the thermal cycle historyincreases in the process, stripping occurs to cause formation ofpinholes. Particularly, since the same process is repeated a pluralityof times in the multilayer wiring forming process, a wiring portionformed in a lower layer in advance is subjected to a thermal history inproportion to the number of wiring layers and, thus, pinholes are moreliable to occur.

In the Patent Document 2, a compound capable of supplying an atomicgroup such as Si(NCO)₄ bulkier than an OH group is supplied in a gasstate at a temperature of 20° C. to the pores exposed on the side wallof the porous interlayer insulating film after the etching, therebyblocking the pores. However, there is a possibility that the atomicgroup proceeding into the pores further proceeds to the inside of thefilm through pores. That is, many of the pores introduced for reducingthe permittivity are filled with a combination of silicon, oxygen, andnitrogen having a high polarizability, which thus causes a largeincrease in permittivity of the interlayer insulating film. Further,since such a bulky atomic group is chemically unstable as compared withperipheral materials, there is a possibility that it is desorbed duringthe multilayer wiring process so as to be a supply route of water or gasagain. Further, in the foregoing Patent Documents 1 and 2, the pores ofthe side wall are blocked without removing an etching gas absorbed inthe film. Consequently, fluorine remaining in the film causes formationof voids in the porous interlayer insulating film or is released againduring the multilayer wiring process to cause corrosion of a wiringmaterial.

The second problem is degradation of the adhesion between a porousinterlayer insulating film and an adjacent film. The multilayering ofthe wiring structure adapted to the miniaturization and integration oftransistors increases stress concentration at the interface betweendifferent kinds of materials forming a laminated film. Therefore, theadhesion between particularly a porous interlayer insulating film and afilm adjacent thereto tends to degrade. In terms of the process, theadhesion between a hard mask and a porous interlayer insulating film inthe CMP process is important. Further, since large stresses are appliedalso in semiconductor element mounting processes such as dicing,packaging, and wire bonding, the improvement in adhesion strength is animportant subject.

The Patent Document 3 is conceived for solving these problems. In theprior art described in the Patent Document 3, the silicon oxide film orthe silicon nitride film is inserted as the adhesive layer at theinterface between the underlying substrate and the interlayer insulatingfilm. However, this adhesive layer is made of a material with anextremely high permittivity and thus largely increases the effectivepermittivity of the entire wiring structure. It further discloses theprocess of forming silicon dangling bonds on the underlying substrate.However, since the substrate is opened to the atmosphere for forming theinterlayer insulating film after the formation of the dangling bonds,the silicon oxide film is resultantly formed on the surface of theunderlying substrate, thus increasing the permittivity.

The third problem is degradation of a film strength. Since pores areintroduced in a porous interlayer insulating film, the film strength isinevitably degraded. As described above, in the multilayering of wiringand the mounting processes such as bonding, the strong stresses andmechanical impacts are applied to the inside of the wiring structure.Therefore, the mechanically weak porous interlayer insulating film issubjected to film breakage. The Patent Document 4 is conceived forsolving these problems. The prior art described in the Patent Document 4largely shortens the baking time of the coated film by the use of theelectron-beam irradiation and, further, realizes the increase instrength. However, the pore formation by the coated film volatilizesvolatile molecules to serve as nuclei of pores at the baking stage.Accordingly, there is a drawback that the pores tend to be through holesand thus the pore size control is difficult. That is, the gas, water, ormetal diffusion effect is large. Therefore, it becomes difficult toimprove the film strength and simultaneously suppress the diffusionphenomenon due to the pores.

As described above, there has not been proposed a wiring structure, asemiconductor device or its manufacturing method that can simultaneouslysatisfy the three subjects, i.e. the suppression of the diffusionphenomenon due to the pores, the improvement in adhesion, and theimprovement in film strength.

This invention has been made in view of the foregoing problems and hasan object to provide a highly reliable semiconductor device avoiding adiffusion phenomenon otherwise caused by pores of a porous interlayerinsulating film, degradation of the adhesion to an adjacent film, anddegradation of a film strength without increasing the effectivepermittivity of the semiconductor device, and a manufacturing methodthereof.

Means for Solving the Problem

In order to accomplish the above object, a wiring structure of thisinvention is a wiring structure of a semiconductor device formed, on asemiconductor element, with a barrier insulating film and a first porousinterlayer insulating film containing pores, and having a wiring and avia plug formed by embedding a metal wiring material in a wiring trenchand a via hole formed in the first porous interlayer insulating film,and is characterized in that a second porous interlayer insulating filmis formed at least a portion of the first porous interlayer insulatingfilm and pores contained in the second porous interlayer insulating filmhave a size greater than that of the pores contained in the first porousinterlayer insulating film.

The above wiring structure is characterized in that the size of thepores contained in the second porous interlayer insulating film is 1 nmor less. Further, the above wiring structure is characterized in thatconstituent elements of the first porous interlayer insulating film arethe same as those of the second porous interlayer insulating film.Further, the above wiring structure is characterized in that the firstand second porous interlayer insulating films are each in the form of asilicon oxide film containing carbon and hydrogen.

The above wiring structure is characterized in that a ratio of thenumber of carbon atoms to the number of silicon atoms in the secondporous interlayer insulating film is smaller than a ratio of the numberof carbon atoms to the number of silicon atoms in the first porousinterlayer insulating film and a ratio of the number of oxygen atoms tothe number of silicon atoms in the second porous interlayer insulatingfilm is greater than a ratio of the number of oxygen atoms to the numberof silicon atoms in the first porous interlayer insulating film.

The above wiring structure is characterized in that the second porousinterlayer insulating film is formed at a side wall, surrounding themetal wiring material, of the first porous interlayer insulating filmand the second porous interlayer insulating film has a thickness of 5 nmor more.

The above wiring structure is characterized in that a third porousinterlayer insulating film is formed in a surface layer of a viainterlayer insulating film being the first porous interlayer insulatingfilm surrounding a side surface of the via plug, in a surface layer of awiring interlayer insulating film being the first porous interlayerinsulating film surrounding a side surface of the wiring, or in each ofboth the surface layers. The above wiring structure is characterized inthat the third porous interlayer insulating film formed in the surfacelayer of the via interlayer insulating film, in the surface layer of thewiring interlayer insulating film, or in each of both the surface layersis 5 nm or more and 30 nm or less.

The above wiring structure is characterized by comprising the thirdporous interlayer insulating film of 5 nm or more and 30 nm or lessformed in the surface layer of the via interlayer insulating film, inthe surface layer of the wiring interlayer insulating film, or in eachof both the surface layers and the second porous interlayer insulatingfilm of 5 nm or more formed at the side wall, surrounding the metalwiring material, of the first porous interlayer insulating film.

The above wiring structure is characterized in that pores contained inthe third porous interlayer insulating film have a size greater thanthat of the pores contained in the first porous interlayer insulatingfilm, and the size of the pores contained in the second porousinterlayer insulating film is 1 nm or less and greater than that of thepores contained in the third porous interlayer insulating film.

The above wiring structure is characterized in that the wiring trenchand the via hole each have a tapered shape with an opening diameterdecreasing downward.

The above wiring structure is characterized in that a fourth porousinterlayer insulating film is formed over an entire via interlayerinsulating film being the first porous interlayer insulating filmsurrounding a side surface of the via plug, over an entire wiringinterlayer insulating film being the first porous interlayer insulatingfilm surrounding a side surface of the wiring, or over each of both theentire via and wiring interlayer insulating films, and pores containedin the fourth porous interlayer insulating film have a size greater thanthat of the pores contained in the first porous interlayer insulatingfilm.

The above wiring structure is characterized in that the wiringinterlayer insulating film being the first porous interlayer insulatingfilm surrounding the side surface of the wiring is made of a materialcontaining cyclic SiO bonds and a hydrocarbon is bonded to a side chainof the cyclic SiO bonds. Further, the above wiring structure ischaracterized in that the cyclic SiO bonds form a six-membered ring oran eight-membered ring.

A semiconductor device of this invention is characterized in that theabove wiring structure forms a plural-layer structure and a transistoris mounted in the plural-layer wiring structure.

A semiconductor device manufacturing method of this invention is amethod of manufacturing a semiconductor device having a transistormounted in wiring of a plural-layer structure, and is characterized bycomprising, in a manufacturing step of the semiconductor device formed,on a semiconductor element, with a barrier insulating film and a porousinterlayer insulating film and having a wiring and a via plug formed byembedding a metal wiring material in a wiring trench and a via holeformed in the porous interlayer insulating film, a step of irradiatingan electron beam or an ultraviolet ray onto at least a portion of theporous interlayer insulating film before forming an opening in thebarrier insulating film.

The above semiconductor device manufacturing method is characterized bycomprising a step of etching the porous interlayer insulating film toform an opening and then irradiating an electron beam or an ultravioletray onto a side wall of the opening.

The above semiconductor device manufacturing method is characterized bycomprising a step of irradiating an electron beam or an ultraviolet rayafter forming an interlayer insulating film (hereinafter, a viainterlayer insulating film) surrounding a side surface of the via plug,after forming an interlayer insulating film (hereinafter, a wiringinterlayer insulating film) surrounding a side surface of the wiring, orafter both the film forming steps.

The above semiconductor device manufacturing method is characterized bycomprising a first irradiation step of irradiating an electron beam oran ultraviolet ray after forming the via interlayer insulating film,after forming the wiring interlayer insulating film, or after both thefilm forming steps, and a second irradiation step of etching the wiringinterlayer insulating film and the via interlayer insulating film toform an opening and then irradiating an electron beam or an ultravioletray onto a side wall of the opening.

The above semiconductor device manufacturing method is characterized inthat an arrival energy of electrons in the step of irradiating theelectron beam is 0.25 keV or more and 20 keV or less and a wavelength ofultraviolet light in the step of irradiating the ultraviolet ray is 150to 275 nm.

The above semiconductor device manufacturing method is characterized inthat a temperature of a substrate of the semiconductor device in thestep of irradiating the electron beam or the ultraviolet ray is set to200° C. to 450° C., and further, the above semiconductor devicemanufacturing method is characterized in that irradiation is performedby inclining and rotating a substrate of the semiconductor device in thestep of irradiating the electron beam or the ultraviolet ray.

Further, the above semiconductor device manufacturing method ischaracterized in that an insulating film having a pore size smaller thanthat of a via interlayer insulating film being the porous interlayerinsulating film surrounding a side surface of the via plug, or aninsulating film in which a ratio of the number of carbon atoms to thenumber of silicon atoms is greater than that in the via interlayerinsulating film is applied to at least a wiring interlayer insulatingfilm being the porous interlayer insulating film surrounding a sidesurface of the wiring. The above wiring interlayer insulating film ischaracterized in that the pore size is 0.5 nm or less and the ratio ofthe number of carbon atoms to the number of silicon atoms is three ormore. Further, the above semiconductor device manufacturing method ischaracterized in that the wiring interlayer insulating film is made of amaterial containing cyclic SiO bonds and a hydrocarbon is bonded to aside chain of the cyclic SiO bonds. The cyclic SiO bonds arecharacterized by forming a six-membered ring or an eight-membered ring.

Effect of the Invention

According to this invention, by forming a low-permittivity andhigh-strength porous modified layer at the interlayer insulating filmopening side wall, it is possible to improve the mechanical strength andadhesion of the wiring structure. Further, according to this invention,since it is possible to effectively remove an etching gas or the likeadsorbed on the opening side wall, there is no problem of corrosion of ametal wiring material or the like and thus the highly reliable wiringproperties can be realized. Further, according to this invention, sincethe pore size of the porous modified layer is controlled to 1 nm orless, it is possible to effectively suppress diffusion of gas, chemicalsolution, metal, or the like. Therefore, since the resistance to dynamicload can be improved without degrading the performance of asemiconductor device, it is possible to realize higher performance andhigher reliability of the semiconductor device.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is sectional structural views, relating to a semiconductor devicemanufacturing method, showing a first embodiment of this invention.

FIG. 2 is a schematic view of an electron-beam or ultraviolet-rayirradiation apparatus.

FIG. 3 is a graph showing the ultraviolet-ray irradiation timedependence of relative permittivity and film strength of a porousinsulating film.

FIG. 4 is a graph showing the relationship between relative permittivityand film strength after the electron-beam irradiation and that after theultraviolet-ray irradiation.

FIG. 5 is a graph showing the adhesion evaluation results after theelectron-beam irradiation or the ultraviolet-ray irradiation.

FIG. 6 is a graph showing the relative permittivity dependence of filmstrength and adhesion strength after the electron-beam irradiation orthe ultraviolet-ray irradiation.

FIG. 7 is a graph showing the ultraviolet-ray irradiation timedependence of FTIR spectrum.

FIG. 8 is a graph showing the film strength dependence of average poresize by the electron-beam irradiation or the ultraviolet-rayirradiation.

FIG. 9 is a schematic view showing a porous film strengtheningmechanism.

FIG. 10 is a graph showing the average pore size dependence ofabsorption amount of water diffusing in a porous insulating film andpermittivity increase amount thereof.

FIG. 11 is a sectional structural view showing the first embodiment ofthis invention.

FIG. 12 is an enlarged view of the sectional structure showing the firstembodiment of this invention.

FIG. 13 is a sectional structural view (perpendicular opening shape)showing the first embodiment of this invention.

FIG. 14 is a sectional structural view (tapered shape) showing the firstembodiment of this invention.

FIG. 15 is a sectional structural view (inclined rotation) showing thefirst embodiment of this invention.

FIG. 16 is a graph showing the relationship between electron energy andinteraction.

FIG. 17 is a graph showing the electron energy dependence of electronpenetration depth.

FIG. 18 is sectional structural views, relating to a semiconductordevice manufacturing method, showing a second embodiment of thisinvention.

FIG. 19 is an enlarged view of the sectional structure showing thesecond embodiment of this invention.

FIG. 20 is a sectional structural view showing the second embodiment ofthis invention.

FIG. 21 is sectional structural views, relating to a semiconductordevice manufacturing method, showing a third embodiment of thisinvention.

FIG. 22 is a sectional structural view showing the third embodiment ofthis invention.

FIG. 23 is a sectional structural view showing the third embodiment ofthis invention.

FIG. 24 is a sectional structural view showing a fourth embodiment ofthis invention.

FIG. 25 shows the electron-beam irradiation time dependence of filmshrinkage ratio of a film A and a film B.

FIG. 26 shows the upper-layer film thickness dependence of filmshrinkage ratio of the film A and the film B.

FIG. 27 is a schematic view showing strengthening mechanisms of the filmA and the film B.

FIG. 28 shows the UV wavelength dependence of FTIR spectrum of the filmA and the film B.

FIG. 29 shows the gas desorption characteristics of the film A and thefilm B in the UV irradiation.

FIG. 30 is sectional structural views relating to a semiconductor devicemanufacturing method according to a prior art.

FIG. 31 is an enlarged view of a sectional wiring structure according tothe prior art.

BEST MODE FOR CARRYING OUT THE INVENTION

Now, embodiments of this invention will be described in detail withreference to the drawings. All the following structural viewsexemplarily show the embodiments of this invention and thus are notintended to define the sizes of the structures according to thisinvention on the basis of the ratios of components in the drawings.

First Embodiment

Referring to FIG. 1, there are shown sectional views relating to asemiconductor device manufacturing method as a first embodiment of thisinvention. As shown in FIG. 1, (a), at first, a via interlayerinsulating film 2, an etching stopper 3, a wiring interlayer insulatingfilm 4, and a hard mask 5 are deposited in the order named on a barrierinsulating film 1 having a diffusion resistance to Cu. Herein, amaterial having a strong diffusion resistance to Cu is suitable for thebarrier insulating film 1. For example, SiCN, SiN, SiC, SiOC,benzocyclobutene, or the like is preferable.

As each of the via interlayer insulating film 2 and the wiringinterlayer insulating film 4, use is made of a silicon oxide filmcontaining carbon and hydrogen (SiOCH) and having an average pore sizeof less than 1 nm. If the above conditions are satisfied, the via andwiring interlayer insulating films may be made of different kinds ofmaterials. Two kinds of methods, i.e. a coating method and a CVD method,are popular as interlayer insulating film forming methods. The coatingmethod has a feature in that volatile molecules to serve as nuclei ofpores are caused to be contained in main monomers to be a framework of afilm and spin coating is carried out, and then the volatile moleculesare volatilized at the baking stage, so that the pores tend to benonuniform through holes of normally 1 nm or more and thus the pore sizecontrol is difficult. On the other hand, uniform control of pores ofless than 1 nm is enabled for an interlayer insulating film formed bythe CVD method. Therefore, as the via and wiring interlayer insulatingfilms, it is preferable to use insulating films formed by the CVDmethod. Herein, use was made of porous films having an average pore sizeof 0.6 nm.

As the etching stopper 3, use is made of a material having a highetching selectivity to the porous interlayer insulating films. Forexample, there is cited SiO₂, SiCN, SiN, SiC, SiOC, or the like.However, in order to reduce the effective permittivity of the wiringstructure, it is preferable to select a material having as low apermittivity as possible. Further, as the hard mask 5, use is made of amaterial excellent in CMP (Chemical Mechanical Polishing) resistance(e.g. SiO₂, SiCN, SiN, SiC, SiOC, or the like is cited).

Then, as shown in FIG. 1, (b), a dual-damascene trench comprising a viahole 7 and a wiring trench 6 is formed using photoresists and reactiveion etching with a fluorine-based gas. Dual-damascene trench formingmethods include a via-first process in which a via is first formed andthen a photoresist is coated over the formed via to thereby form awiring trench and a trench-first process in which a wiring trench isfirst formed and then a photoresist is coated over the formed wiringtrench to thereby form a via hole. In this invention, the same effect isobtained using either of the methods.

Then, as shown in FIG. 1, (c), an electron beam or ultraviolet ray 8 isirradiated from above the substrate to form a porous modified layer 9 of5 nm or more. The porous modified layer 9 has a feature in that the sizeof pores contained therein is 1 nm or less and greater than the size ofpores contained in the interlayer insulating films before theirradiation of electron beam or ultraviolet ray.

Then, as shown in FIG. 1, (d), after etch-back of the barrier insulatingfilm 1 at the bottom of the via hole, a laminated film of Ta/TaN isformed as a barrier metal 10 in the via hole 7 and the wiring trench 6covered with the porous modified layer 9 and on the entire surface ofthe hard mask 5 by a PVD (Physical Vapor Deposition) method. The barriermetal 10 may be, other than the above, a metal such as Ti and itsnitride or a laminate thereof. A method such as ALD (Atomic LayerDeposition) can be employed as a film forming method other than the PVD.After the formation of the barrier metal, a Cu seed layer iscontinuously deposited by a sputtering method without exposure to theatmosphere and then a Cu film 11 is deposited thereon by a platingmethod. In this manner, the metal wiring material is embedded in the viahole 7 so that a via plug is formed, and the metal wiring material isembedded in the wiring trench 6 so that a wiring is formed.

Then, as shown in FIG. 1, (e), the excess portions, deposited on thehard mask 5, of the barrier metal and the Cu film are removed andflattened by a CMP (Chemical Mechanical Polishing) process (FIG. 1,(d)). Depending on the necessity, a Cu alloy containing a different kindof metal such as Ti, Al, Sn, or Ag may be used as the Cu film.

The via interlayer insulating film 2 and the wiring interlayerinsulating film 3 in this embodiment correspond to a first porousinterlayer insulating film of this invention and the porous modifiedlayer 9 in this embodiment corresponds to a second porous interlayerinsulating film of this invention. Since the porous modified layer 9 isformed by irradiating the ultraviolet ray or the electron beam onto thevia interlayer insulating film 2 and the wiring interlayer insulatingfilm 3, constituent elements of the via interlayer insulating film 2 andthe porous modified layer 9 and of the wiring interlayer insulating film4 and the porous modified layer 9 are all the same. These interlayerinsulating films are formed on a semiconductor element. The terms upper,lower, above, and so on in this invention represent upper, lower, and soon in the manufacturing state as shown in FIG. 1.

Next, on the basis of basic experimental data, a description will begiven of a method of forming a porous modified layer by the irradiationof electron beam or ultraviolet ray being a feature of this invention,and its effects and mechanism. FIG. 2 is a schematic view of anelectron-beam or ultraviolet-ray irradiation apparatus 12. An electronbeam 8 or an ultraviolet ray 8 is irradiated onto an interlayerinsulating film, formed on a semiconductor element, through anirradiation window 13 from an electron-beam source or an ultraviolet-raysource disposed above a sample 15. A semiconductor substrate can beheated by a heater stage 14. The inside of the apparatus is evacuated bya vacuum pump 16. An inert gas or the like can be introduced into theapparatus from a gas inlet 17. It is possible to properly adjustelectron-beam or ultraviolet-ray irradiation energy, irradiation amount,and irradiation time.

Using the above apparatus, an electron beam or an ultraviolet ray isirradiated onto the side walls of the openings, i.e. the via hole andthe wiring trench, in FIG. 1, (c), thereby forming a porous modifiedlayer of 5 nm or more.

Features of the porous modified layer formed at the opening side wallsare as follows. First, the mechanical strength of the porous modifiedlayer is high. Second, the adhesion between the porous modified layerand an adjacent film is high. Third, control is performed such that, inthe porous modified layer, the ratio of the number of carbon atoms tothe number of silicon atoms decreases and the ratio of the number ofoxygen atoms to the number of silicon atoms increases. Fourth, controlis performed such that the average pore size of the porous modifiedlayer is 1 nm or less and greater than the average pore size of theinterlayer insulating films. Fifth, the etching gas adsorbed in thevicinity of the side walls of the via hole and the wiring trench iseffectively removed.

Hereinbelow, the effects of this invention due to the introduction ofthe porous modified layer will be described in detail on the basis ofthe basic experimental results supporting the foregoing features.

With respect to the first feature, FIG. 3 shows the irradiation timedependence of relative permittivity and film strength of a porousinsulating film when an ultraviolet ray was irradiated. Herein, use wasmade of a sample with an SiOCH film of 200 nm containing carbon andhydrogen formed by the foregoing CVD method. The average pore size was0.6 nm. The permittivity showed a tendency of being constant with almostno dependence when the irradiation time of ultraviolet ray was aboutthree minutes, while gradually increasing with an irradiation time ofthree minutes or more. On the other hand, the film strength largelyincreased with the irradiation time.

FIG. 4 is a graph plotting the relationship between relativepermittivity and film strength based on the results of FIG. 3. FIG. 4also shows the results by the electron-beam irradiation. It is shownthat the film strength dependence of permittivity by the ultraviolet-rayirradiation and that by the electron-beam irradiation well correspond toeach other and the same effect is obtained. A black circle () in thefigure represents an insulating film with a composition of SiOCH and arelative permittivity of 3.1 that has not been subjected to theelectron-beam or ultraviolet-ray irradiation. In comparison betweenthese insulating films at the same film strength (13 GPa), the relativepermittivity of the porous insulating film irradiated with the electronbeam or the ultraviolet ray is about 2.7 and thus it becomes possible toachieve a large reduction in permittivity. Therefore, the electron-beamor ultraviolet-ray irradiation can largely improve the mechanicalstrength of the porous insulating film while maintaining the lowpermittivity.

With respect to the second feature, FIG. 5 shows the results ofevaluating the adhesion strength of a laminated structure (etchingstopper/porous insulating film/barrier insulating film) due to theelectron-beam or ultraviolet-ray irradiation. SiO₂ was used as theetching stopper and SiCN was used as the barrier insulating film. Theupper-layer SiO₂ was formed after irradiating an electron beam or anultraviolet ray onto the porous insulating film. The adhesion strengthwas evaluated by an m-ELT (modified Edge Lift-off Test). Strippedportions are all at the porous insulating film/barrier insulating filminterface and therefore the adhesion of this interface is relativelylow. However, the adhesion strength of the porous insulatingfilm/barrier insulating film interface increased to about 1.5 times bythe electron-beam or ultraviolet-ray irradiation. FIG. 6 shows therelative permittivity dependence of film strength and adhesion strength.A black circle () in the figure represents an insulating film with acomposition of SiOCH by the CVD method that has not been subjected tothe electron-beam or ultraviolet-ray irradiation. It was confirmed thatthe film strength and the adhesion were largely improved at the lowpermittivity by the electron-beam or ultraviolet-ray irradiation.

With respect to the third feature, FIG. 7 shows the ultraviolet-rayirradiation time dependence of film composition, using an FTIR (FourierTransform Infrared). The spectra are illustrated so as to be shiftedupward as the ultraviolet-ray irradiation time increases. In the FTIRspectrum before the irradiation, there are observed a Si—CH₃ peak (1270cm⁻¹) at which carbon and hydrogen in the form of methyl groups (CH₃)are bonded to silicon atoms and a peak (1000-1200 cm⁻¹) attributed toSiO—Si bonds forming a main framework of the film. The film compositionshows a tendency that as the ultraviolet-ray irradiation time increases,the Si—CH₃ peak decreases and a peak (2200 cm⁻¹) attributed to SiH bondsnewly increases. That is, this means that the methyl groups aredissociated and desorbed due to the ultraviolet-ray irradiation energyand a part of the dissociated hydrogen atoms terminate silicon danglingbonds.

As shown in an inserted diagram in FIG. 7, two split peaks of SiO—Sichange with the irradiation time from cage-type bonding to network-typeSiO—Si. This change shows that isolated short-distance. SiO—Si bonds arecrosslinked to form a strong long-distance network. These desorption ofthe methyl groups and formation of SiO—Si into the network were observedalso in the case of the electron-beam irradiation. Further, as a resultof evaluating the atomic composition in the porous modified layer afterthe irradiation by photoelectron spectroscopy (XPS), it showed atendency after either irradiation that the ratio of the number of carbonatoms to the number of silicon atoms decreased and the ratio of thenumber of oxygen atoms to the number of silicon atoms increased as shownin Table 1. These atomic composition ratios can also be confirmed using,for example, a technique such as EDX (Energy Dispersive X-ray) or EELS(Electron Energy Loss Spectroscopy) mounted in a transmission electronmicroscope (TEM), thereby analyzing the chemical composition of theporous modified layer formed in the fine wiring structure.

TABLE 1 O/Si C/Si Nontreated 1.47 0.37 After Ultraviolet-Ray 1.53 0.25Irradiation After Electron-Beam 1.54 0.30 Irradiation

With respect to the fourth feature, FIG. 8 shows the film strengthdependence of average pore size after the electron-beam orultraviolet-ray irradiation, using small-angle X-ray scattering. Theaverage pore size described in this specification is a pore size whenthe distribution area becomes half in each of pore size distributioncurves shown in an inserted diagram of FIG. 8. The average pore sizeshowed a tendency of increasing as the film strength increased, aftereither irradiation. This increase in average pore size due to theelectron-beam or ultraviolet-ray irradiation is caused by desorption ofbulky methyl groups projecting into the pores as shown in FIG. 9.However, the increase in pore size causes degradation of the wiringproperties because the pores serve as flow paths for water, gas, or thelike. FIG. 10 shows the average pore size dependence of absorptionamount of water in a porous insulating film and permittivity increaseamount thereof, using thermal desorption spectroscopy (TDS). Bycontrolling the average pore size to approximately 1 nm or less, it ispossible to effectively suppress the water absorption amount and furtherto realize the stable low-permittivity properties.

Therefore, although the formation of the porous modified layer by theelectron-beam or ultraviolet-ray irradiation acts in a direction toincrease the pore size, by controlling the average size thereof to 1 nmor less, it is possible to largely suppress a rapid increase of water,chemical solution, or gas during the process and to realize highstrength and high adhesion.

With respect to the fifth feature, although the fluorine-based gas beingthe etching gas is adsorbed in the vicinity of the side walls after theetching, it can be effectively removed in the course of forming theporous modified layer of 5 nm or more. As main causes of such a removaleffect, there are cited the desorption assist effect by electrons orultraviolet light and an increase in the number of desorption paths dueto the increase in pore size. By the removal of the fluorine-basedetching gas, it is possible to avoid the problem of corrosion due toreaction with the metal wiring material or the like.

As described above as to the five features, the formation of the porousmodified layer in the interlayer insulating film openings by theelectron-beam or ultraviolet-ray irradiation is such that, as also shownin FIG. 11, the modified layer 9 is formed, while maintaining its lowpermittivity, as a support so as to surround the wiring material 11 tostrengthen it. Therefore, it exhibits a strong resistance to amechanical impact such as wire bonding. The mechanical strength of theporous modified layer is subjected to limitation by the average poresize of 1 nm or less in terms of gas diffusion resistance. That is, asshown in FIG. 8, about 17.5 GPa becomes its upper limit. As comparedwith conventional, the wiring material is surrounded by the supporthaving a 3.5 times greater mechanical strength.

With respect to the adhesion, all regions, surrounded by ellipses 18 inFIG. 11, of the wiring structure are increased in adhesion. FIG. 12shows an enlarged sectional view of the vicinity of the porous modifiedlayer 9. With respect to the adhesion between the interlayer insulatingfilm and the barrier metal, by forming the porous modified layer 9, fineconcave/convex portions due to an increase in size of pores 19 areformed as compared with the case where the modified layer is not formedand, therefore, the adhesion to the barrier metal 10 can be improved byan anchoring effect as shown in FIG. 12. Further, in this invention,since the average pore size of the porous modified layer is set to 1 nmor less, there is no occurrence of the coating failure of the barriermetal as shown in the conventional example (FIG. 31). Stripped portionsin the CMP process are edge portions of the hard mask and the wiringinterlayer insulating film adjacent to the barrier metal. However, theadhesion of this interface is also largely improved by forming theporous modified layer, so that it is possible to ensure a sufficient CMPresistance when carrying out wiring on an experimental basis. Further,although, as described before, the interface between the interlayerinsulating film and the barrier insulating film is the interface withthe lowest adhesion in the length-direction laminated structure, it ispossible to achieve an approximately 1.5 times greater strength (FIG.5).

As described above, according to the effects of this invention, it ispossible to achieve the increase in film strength and the increase inadhesion, suppress the diffusion phenomenon due to the pores, and avoidthe problem of metal wiring material corrosion or the like whilemaintaining the low permittivity, thereby forming a highly reliablewiring structure, i.e. semiconductor device.

Next, a description will be given of the optimum electron-beam orultraviolet-ray irradiation conditions for obtaining the foregoingeffects. In order to form the porous modified layer at the respectiveside walls of the fine and high-aspect-ratio wiring trench and via hole,it is necessary to effectively irradiate an electron beam or anultraviolet ray onto the above side walls. The ultraviolet ray isdivergent light and thus reaches even the opening side walls formed in aperpendicular shape and, therefore, the formation of the modified layeris easy. In the case of the electron-beam irradiation, the directivityof an electron beam is strong. However, as shown in FIG. 13, electrons20 are charged up on the surface of the hard mask 15 being an insulatingfilm. Therefore, the orbit of electrons incident in the vicinity of theopening is bent so that the electrons also reach the opening side walls,and consequently, it is possible to form a porous modified layer ofabout 8 nm. However, in order to further enhance the effect ofirradiation onto the side walls, it is possible to form a tapered viahole and a tapered wiring trench as shown in FIG. 14. Further, as shownin FIG. 15, by inclining a substrate of a semiconductor device andirradiating an electron beam while rotating it, it is also possible toeffectively form a porous modified layer at the side wall portions andcontrol the formation. For example, in the case where the minimum widthof a wiring trench and the width of a via hole are equal to each other,given that the height from the bottom of the via hole to the top of thetrench is h and each width is w, it is possible to obtain a sufficientirradiation effect even at the bottom portion of the via hole byperforming the irradiation at an incident angle θ satisfying tan θ>w/h.Although, herein, the case is shown in which the substrate of thesemiconductor device is inclined, the electron-beam source itself may beinclined for irradiation. The electron-beam irradiation methods shown inFIGS. 14 and 15 may also be applied to the ultraviolet-ray irradiation.

As the electron-beam or ultraviolet-ray irradiation energy, it isnecessary to apply an energy sufficient for causing the desorption ofthe methyl groups and the recombination of the SiO—Si bonds in theporous insulating film. The bonding energy of SiO changes depending onthe kinds of peripheral bonding species and their bonding states, but isapproximately 4.5 eV to 8.5 eV which is greater than the bonding energyof Si—CH₃. Therefore, by substantially adding an energy corresponding tothe bonding energy of SiO, the porous modified layer can be formed. Inthe case of the ultraviolet, it is preferable to irradiate ultravioletlight having a wavelength of 150 to 275 nm corresponding to the bondingenergy of SiO.

On the other hand, with respect to the electron-beam irradiation energy,it is normally a high energy of about several keV for ensuring thedirectivity of an electron beam to some degree and thus the interactionwith a substance is different from that in the case of the lightirradiation like the ultraviolet-ray irradiation. FIG. 16 shows thegeneral relationship of interaction between electrons and a substancewhile changing the electron energy. Although the interaction isfacilitated as the energy of electrons increases, the electrons do notinteract with a substance but pass at a certain or greater energy. Forexample, it was experimentally confirmed that, in the case of a porousinsulating film with a composition of SiOCH, a porous modified layer wasnot formed with the irradiation of an electron beam having an energy of50 keV or more. Consequently, the upper limit of the electron energy is50 keV.

From the results of the Monte Carlo simulation, as shown in FIG. 17, thepenetration depth of electrons into the insulating film with thecomposition of SiOCH increases as the electron energy increases. Inorder to form a porous modified layer of 5 nm or more with which theeffects are obtained in this invention, it is necessary to set theelectron penetration length to at least 5 nm or more. That is, it ispreferable that the lower limit of the electron energy be controlled at0.25 keV. Accordingly, the electron energy upon reaching a substrate(respective insulating films to be modified) of a semiconductor deviceis suitably 0.25 keV or more and 50 keV or less. However, if theelectron energy excessively increases, it becomes difficult that thereoccur changes in electron obit in the opening due to charge-up as shownin FIG. 13. Therefore, it is more preferable that the electron energy beset to 0.25 keV or more and 20 keV or less.

As also shown in FIG. 17, when an electron beam of 20 keV being theupper-limit energy is irradiated, electrons penetrate deep into thesubstrate. However, desorption of methyl groups is essential in thecourse of forming the porous modified layer. Therefore, the modifiedlayer is selectively formed from the opening side walls where the methylgroups tend to be desorbed, i.e. the wiring trench and via hole sidewalls where the porous insulting films are exposed.

Also in the case of the ultraviolet-ray irradiation, the porous modifiedlayer is formed from the opening side walls by the same mechanism. Thethickness of the porous modified layer can be adjusted by properlycontrolling the dose, the electron acceleration voltage, the substratetemperature, and the treatment time in the case of the electron-beamirradiation. On the other hand, in the case of the ultraviolet-rayirradiation, it can be adjusted by properly controlling the wavelengthwithin the foregoing range, the power density, the substratetemperature, and the treatment time.

With respect to the setting of the substrate temperature at the time ofthe electron-beam or ultraviolet-ray irradiation, it should be set to ahigh temperature for desorbing the dissociated methyl groups from thefilm. In terms of the treatment time, since the treatment is finished ina shorter time at a higher temperature, the throughput is improved.However, if the temperature becomes too high, there is a case where Cuin fine vias in the multilayer wiring structure is subjected toexcessive thermal stress so as to be disconnected, and therefore, theupper limit of the temperature is limited to 450° C. or less. Asdescribed above, in terms of higher throughput and wiring reliability,the substrate temperature is preferably 200° C. to 450° C. Theatmosphere at the time of the irradiation may be a vacuum, but, in orderto reduce deposition of hydrocarbons or the like onto the inner wall ofthe apparatus due to desorbed gas from the substrate, it is preferableto introduce an inert gas such as Ar or He from the gas inlet.

Example 1

Next, using a specific example of a semiconductor device according tothis embodiment, a description will be given of a film laminatedstructure provided in the semiconductor device. This invention is notlimited at all by such an example.

As shown in FIG. 1, (a), at first, on SiCN of 30 nm as a barrierinsulating film 1 having a diffusion resistance to Cu, a via interlayerinsulating film 2 with a composition of SiOCH having an average poresize of 0.6 nm is formed to 150 nm by a CVD method and, thereon, SiO₂ isformed to 30 nm as an etching stopper 3. On the etching stopper 3, awiring interlayer insulating film 4 with a composition of SiOCH havingan average pore size of 0.6 nm is formed to 150 nm by the CVD method andSiO₂ is deposited to 30 nm as a hard mask 5 in order. Herein, the samematerial was used as the wiring interlayer insulating film 4 and the viainterlayer insulating film 2.

Then, as shown in FIG. 1, (b), a dual-damascene trench comprising a viahole 7 and a trench 6 is formed by the use of a via-first process usingphotoresists and reactive ion etching with a fluorine-based gas CF4. Thevia diameter and the wiring width are each 100 nm.

Then, as shown in FIG. 1, (c), an electron beam or ultraviolet ray 8 isirradiated from above the substrate to form a porous modified layer 9 of5 nm or more at the opening side walls. The conditions for theelectron-beam irradiation were such that the electron energy wascontrolled at 7 keV and the treatment was performed for 5 minutes. Onthe other hand, the conditions for the ultraviolet-ray irradiation weresuch that the treatment was performed for 5 minutes using ultravioletlight having a central wavelength of 222 nm. In each irradiation, thetreatment was performed with a substrate temperature of 350° C. in a Hegas of 6650 Pa.

Then, as shown in FIG. 1, (d), after etch-back of the barrier insulatingfilm SiCN at the bottom of the via hole 7, a laminated film of Ta/TaN of10 nm and 5 nm, respectively, is formed as a barrier metal 10 in the viahole 7 and the wiring trench 6 covered with the porous modified layer 9and on the entire surface of the hard mask 5 by a PVD (Physical VaporDeposition) method. After the formation of the barrier metal, a Cu seedlayer having a thickness of 50 nm is continuously deposited by asputtering method without exposure to the atmosphere and then a Cu film11 is deposited thereon by a plating method.

Then, as shown in FIG. 1, (e), the excess portions, deposited on thehard mask 5, of the barrier metal and the Cu film are removed andflattened by a CMP (Chemical Mechanical Polishing) process (FIG. 1,(d)).

In this example, the electron-beam irradiation process or theultraviolet-ray irradiation process is performed before the etch-backprocess of the barrier insulating film SiCN. However, the irradiationprocess can be performed after the etch-back process of the barrierinsulating film. However, in the case where the irradiation process isperformed after the etch-back of the barrier insulating film, desorbedgas generated in the irradiation process adheres to the surface of a Cufilm (not shown) under the barrier insulating film 1 formed with anopening by the etch-back, thereby modifying the Cu surface. Further, inthe case where the irradiation process is performed after the etch-backof the barrier insulating film, the opening side walls of the viainterlayer insulating film 2 and the wiring interlayer insulating film 4are not strengthened before the etch-back of the barrier insulatingfilm. Accordingly, these side walls tend to be subjected to side etchingduring the etch-back, so that the dimensional shift increases.Therefore, the electron-beam irradiation process or the ultraviolet-rayirradiation process is preferably performed before the etch-back processof the barrier insulating film SiCN.

As a result of observing a sectional structure after the formation ofthe wiring structure by the TEM, there was observed the modified layer 9of about 8 nm to 15 nm at the via and trench side walls. By observingthis modified layer 9 in more detail, there were observed pores having adiameter of 0.8 to 1.0 nm. Further, as a result of carrying out achemical composition analysis of the porous modified layer 9 by theEELS, it was confirmed that the spectrum of oxygen to the spectrum of Sirelatively increased and the spectrum of carbon to the spectrum ofsilicon relatively decreased, in the porous modified layer 9 as comparedwith the porous interlayer insulating films 2 and 4. Further, the abovewiring structure was formed in six layers and mounted as an LSI deviceand, as a result, there was observed no failure such as film strippingduring the process and the yield was improved by 30% or more as comparedwith conventional. Further, it was also confirmed that, with respect tothe electrical properties, there was almost no change in effectivepermittivity and the stable wiring properties were exhibited.

Second Embodiment

FIG. 18 is sectional structural views, relating to a semiconductordevice manufacturing method, for explaining a second embodiment of thisinvention.

As shown in FIG. 18, (a), at first, a via interlayer insulating film 2is formed on a barrier insulating film 1 having a diffusion resistanceto Cu. A material having a strong diffusion resistance to Cu is suitablefor the barrier insulating film 1. For example, SiCN, SiN, SiC, SiOC,benzocyclobutene, or the like is preferable. As the via interlayerinsulating film 2, use is made of a silicon oxide film containing carbonand hydrogen (SiOCH) and having an average pore size of less than 1 nm.Herein, use was made of a porous interlayer insulating film with anaverage pore size of 0.6 nm formed by a CVD method.

After the formation of the via interlayer insulating film 2, as shown inFIG. 18, (b), an electron beam or ultraviolet ray 8 is irradiated fromabove the substrate to form a first porous modified layer 21 over theentire via interlayer insulating film 2. Pores contained in the firstporous modified layer 21 have a feature in that the size thereof is lessthan 1 nm and greater than the size of pores originally contained in theporous interlayer insulating film before the irradiation of the electronbeam or ultraviolet ray 8.

Then, as shown in FIG. 18, (c), an etching stopper 3, a wiringinterlayer insulating film 4, and a hard mask 5 are deposited in theorder named. As the etching stopper 3, use is made of a material havinga high etching selectivity to the porous interlayer insulating film. Forexample, there is SiO₂, SiCN, SiN, SiC, SiOC, or the like. However, inorder to reduce the effective permittivity of the wiring structure, itis preferable to select a material having as low a permittivity aspossible. Herein, use was made of SiO₂ formed by the CVD method. As thewiring interlayer insulating film 4, use is made of a silicon oxide filmcontaining carbon and hydrogen (SiOCH) and having an average pore sizeof less than 1 nm. If the above conditions are satisfied, the wiringinterlayer insulating film 4 may be made of a material different fromthat of the via interlayer insulating film. As the hard mask 5, use ismade of a material excellent in CMP (Chemical Mechanical Polishing)resistance (e.g. SiO₂, SiCN, SiN, SiC, SiOC, or the like is cited).

Then, as shown in FIG. 18, (d), a dual-damascene trench comprising a viahole 7 and a wiring trench 6 is formed using photoresists and reactiveion etching with a fluorine-based gas. Dual-damascene trench formingmethods include a via-first process in which a via is first formed andthen a photoresist is coated over the formed via to thereby form awiring trench and a trench-first process in which a wiring trench isfirst formed and then a photoresist is coated over the formed wiringtrench to thereby form a via hole. In this invention, the same effect isobtained using either of the methods.

Then, as shown in FIG. 18, (e), an electron beam or ultraviolet ray 8 isirradiated from above the substrate to form a second porous modifiedlayer 9 of 5 nm or more at the opening side walls. The second porousmodified layer 9 has a feature in that the average size of porescontained therein is 1 nm or less and greater than the average size ofthe pores contained in the first porous modified layer 21. In theforming process of the porous modified layer 9, it is possible tofurther enhance the irradiation effect by applying the tapered openingsshown in FIG. 14 or using the inclined rotation method shown in FIG. 15.

Then, as shown in FIG. 18, (f), after etch-back of the barrierinsulating film 1 at the bottom of the via hole 7, a laminated film ofTa/TaN is formed as a barrier metal 10 in the via hole 7 and the wiringtrench 6 covered with the porous modified layer and on the entiresurface of the hard mask 5 by a PVD (Physical Vapor Deposition) method.The barrier metal 10 may be, other than the above, a metal such as Tiand its nitride or a laminate thereof. A method such as ALD (AtomicLayer Deposition) can be employed as a film forming method other thanthe PVD. After the formation of the barrier metal 10, a Cu seed layer iscontinuously deposited by a sputtering method without exposure to theatmosphere and then a Cu film 11 is deposited thereon by a platingmethod.

Then, as shown in FIG. 18, (g), the excess portions, deposited on thehard mask 5, of the barrier metal and the Cu film are removed andflattened by a CMP (Chemical Mechanical Polishing) process. Depending onthe necessity, a Cu alloy containing a different kind of metal such asTi, Al, Sn, or Ag may be used as the Cu film.

The via interlayer insulating film 2 and the wiring interlayerinsulating film 3 in this embodiment correspond to a first porousinterlayer insulating film of this invention and the second porousmodified layer 9 in this embodiment corresponds to a second porousinterlayer insulating film of this invention. Further, the first porousmodified layer 21 formed over the entire via interlayer insulating film2 corresponds to a fourth porous modified layer of this invention.

This embodiment differs from the foregoing first embodiment in that theporous modified layer is formed not only at the via and trench openingside walls, but also over the entire via interlayer insulating film 21.Such electron-beam or ultraviolet-ray irradiation over the entire viainterlayer insulating film 21 can further strengthen the adhesionbetween the barrier insulating film and the via interlayer insulatingfilm. The region for ensuring the adhesion between the via interlayerinsulating film 2 and the barrier insulating film 1 is limited to only asmall portion at the bottom of the via interlayer insulating film 2 inthe first embodiment as shown in FIG. 11, but it expands to all theinterface between the via interlayer insulating film 2 and the barrierinsulating film 1 in this embodiment. The interface between the viainterlayer insulating film 2 and the barrier insulating film 1 is theweakest among the interfaces adjacent to the porous interlayerinsulating films and thus is a main portion where stripping occurs dueto excessive film stress in the multilayering of the wiring or themounting process. Particularly, in an MPU element or the like for asupercomputer, higher dynamic load is generated at the interface betweenthe via interlayer insulating film 2 and the barrier insulating film 1due to the laminated wiring of ten layers or more and an increase inchip size. By applying this embodiment, it becomes possible to provide amultilayer wiring structure with sufficient reliability even for such ahigh-end device. Further, with respect to the interface with the etchingstopper formed on the via interlayer insulating film 21 in the form ofthe porous modified layer, the average size of pores 19 increases byforming the porous modified layer 21 as shown in FIG. 19. Therefore, ascompared with the case where the modified layer 21 is not formed, fineconcave/convex portions are formed on the porous interlayer insulatingfilm 21. Consequently, the adhesion between the etching stopper 3 andthe via interlayer insulating film (porous modified layer) 21 can alsobe improved by the anchoring effect. Further, since the adhesion betweenthe hard mask 5 and the wiring interlayer insulating film 4 is increasedby the porous modified layer 9 formed at the side walls as described inthe first embodiment, sufficient CMP resistance can also be ensured. Asdescribed above, the porous modified layer 9, 21 may be formed in partof or the whole of the interlayer insulating film depending on the kindand use of a device and, for example, as shown in FIG. 20, a porousmodified layer 21 may be formed over the entire wiring interlayerinsulating film 4 in addition to the via interlayer insulating film 2.

Third Embodiment

FIG. 21 is sectional structural views, relating to a semiconductordevice manufacturing method, for explaining a third embodiment of thisinvention.

As shown in FIG. 21, (a), at first, a via interlayer insulating film 2is formed on a barrier insulating film 1 having a diffusion resistanceto Cu. A material having a strong diffusion resistance to Cu is suitablefor the barrier insulating film 1. For example, SiCN, SiN, SiC, SiOC,benzocyclobutene, or the like is preferable. As the via interlayerinsulating film 2, use is made of a silicon oxide film containing carbonand hydrogen (SiOCH) and having an average pore size of less than 1 nm.Herein, use was made of a porous interlayer insulating film with anaverage pore size of 0.6 nm formed by a CVD method.

After the formation of the via interlayer insulating film 2, as shown inFIG. 21, (b), an electron beam or ultraviolet ray 8 is irradiated fromabove the substrate to form a first porous modified layer 21 at thesurface of the via interlayer insulating film 2. The first porousmodified layer 21 has a feature in that the thickness thereof is 5 nm ormore and 30 nm or less and the size of pores contained therein is lessthan 1 nm and greater than the size of pores originally contained in theporous interlayer insulating film 2.

Then, as shown in FIG. 21, (c), a wiring interlayer insulating film 4 isdeposited. The wiring interlayer insulating film 4 is a porousinsulating film with a composition of SiOCH having an average pore sizeof less than 1 nm and formed by the CVD method. If the above conditionsare satisfied, the wiring interlayer insulating film 4 may be made of amaterial different from that of the via interlayer insulating film 2.Then, an electron beam or ultraviolet ray 8 is irradiated from above thewiring interlayer insulating film 4 to form a second porous modifiedlayer 22 at the surface of the wiring interlayer insulating film 4. Thesecond porous modified layer 22 has a feature in that, like the firstporous modified layer 21, the thickness thereof is 5 nm or more and 30nm or less and the size of pores contained therein is less than 1 nm andgreater than the size of pores originally contained in the porousinterlayer insulating film.

Then, as shown in FIG. 21, (d), a dual-damascene trench comprising a viahole 7 and a wiring trench 6 is formed using photoresists and reactiveion etching with a fluorine-based gas. Dual-damascene trench formingmethods include a via-first process in which a via is first formed andthen a photoresist is coated over the formed via to thereby form awiring trench and a trench-first process in which a wiring trench isfirst formed and then a photoresist is coated over the formed wiringtrench to thereby form a via hole. In this invention, the same effect isobtained using either of the methods.

Then, as shown in FIG. 21, (e), an electron beam or ultraviolet ray 8 isirradiated from above the substrate to form a third porous modifiedlayer 9 of 5 nm or more at the opening side walls of the via hole 7 andthe wiring trench 6. The third porous modified layer 9 has a feature inthat the average size of pores contained therein is 1 nm or less andgreater than the average size of the pores contained in the first andsecond porous modified layers. In the forming processes of the first,second, and third porous modified layers, it is possible to furtherenhance the irradiation effect by applying the tapered openings shown inFIG. 14 or using the inclined rotation method shown in FIG. 15.

Then, as shown in FIG. 21, (f), after etch-back of the barrierinsulating film 10 at the bottom of the via hole 7, a laminated film ofTa/TaN is formed as a barrier metal 10, by a PVD (Physical VaporDeposition) method, in the via hole 7 and the wiring trench 6 coveredwith the porous modified layer and on the entire surface of the wiringinterlayer insulating film 4 formed with the second porous modifiedlayer 22. The barrier metal 10 may be, other than the above, a metalsuch as Ti and its nitride or a laminate thereof. A method such as ALD(Atomic Layer Deposition) can be employed as a film forming method otherthan the PVD. After the formation of the barrier metal 10, a Cu seedlayer is continuously deposited by a sputtering method without exposureto the atmosphere and then a Cu film 11 is deposited thereon by aplating method.

Then, as shown in FIG. 21, (g), the excess portions, deposited on thewiring interlayer insulating film 4 formed with the second porousmodified layer 22, of the barrier metal and the Cu film are removed andflattened by a CMP (Chemical Mechanical Polishing) process. Depending onthe necessity, a Cu alloy containing a different kind of metal such asTi, Al, Sn, or Ag may be used as the Cu film.

The via interlayer insulating film 2 and the wiring interlayerinsulating film 3 in this embodiment correspond to a first porousinterlayer insulating film of this invention and the third porousmodified layer 9 in this embodiment corresponds to a second porousinterlayer insulating film of this invention. Further, the first porousmodified layer 21 formed at the surface of the via interlayer insulatingfilm 2 and the second porous modified layer 22 formed at the surface ofthe wiring interlayer insulating film 4 correspond to a third porousmodified layer of this invention.

With respect to the formation of the first and second porous modifiedlayers in this embodiment, as also described in the first embodiment, aporous modified layer with a desired thickness can be formed bycontrolling the electron energy at 0.25 keV to 20 keV and properlyoptimizing the dose, the substrate temperature, and the treatment timein the case of the electron-beam irradiation. On the other hand, in thecase of the ultraviolet-ray irradiation, a porous modified layer with adesired thickness can be formed by properly optimizing the wavelength,the power density, the treatment time, and the substrate temperature.

This embodiment differs from the foregoing first embodiment in that theetching stopper 3 and the hard mask 5 are replaced by the porousmodified layers. As the etching stopper 3 and the hard mask 5, amaterial capable of ensuring the etching selectivity to a porousinsulating film of SiO₂, SiCN, SiN, or the like and a high-strengthmaterial having CMP resistance are suitable, respectively. However,these materials each have a high permittivity and thus increase theeffective permittivity of the entire wiring structure. Specifically, thepermittivity of SiO₂ is 4.2, that of SiCN is 4.9, and that of SiN isabout 7.5. For example, in the case where the porous modified layers 21and 22 each having a relative permittivity of 2.7 (average pore size 0.8nm, film strength 15 GPa) are formed to 30 nm as an etching stopper anda hard mask, respectively, it is possible to reduce the effectivepermittivity by about 11% as compared with the case where SiO₂ is usedas an etching stopper and a hard mask.

As described above, according to this embodiment, by replacingconventionally used high-permittivity etching stopper and hard mask withlow-permittivity, high-strength, high-stability porous modified layers,it is possible to largely reduce the parasitic capacitance in themultilayer wiring. Therefore, by applying the multilayer wiringaccording to this embodiment to a semiconductor device requiring lowpower such as a portable telephone or a mobile device having a smallnumber of wiring layers and a small chip size, it is possible to achieveboth high reliability and high performance.

Further, as shown in FIGS. 22 and 23, this embodiment can be combinedwith the second embodiment. FIG. 22 shows an example in which the entirevia interlayer insulating film 2 is irradiated with an ultraviolet rayor an electron beam so as to be formed into a porous modified layer 21and an ultraviolet ray or an electron beam is irradiated onto the upperportion (surface) of a wiring interlayer insulating film 4 to form aporous modified layer 22. FIG. 23 shows an example in which the entirevia interlayer insulating film 2 is irradiated with an ultraviolet rayor an electron beam so as to be formed into a porous modified layer 21and the entire wiring interlayer insulating film 4 is also irradiatedwith an ultraviolet ray or an electron beam so as to be formed into aporous modified layer 21.

Fourth Embodiment

In the first to third embodiments, the dual-damascene process having apair of a via and a wiring portion has been described. However, in theactual multilayer wiring structure, when an electron beam or anultraviolet ray is irradiated, the wiring structure is also formed inlower layers. Therefore, if electron or ultraviolet depth control isinsufficient at the time of the electron-beam or ultraviolet-rayirradiation, excessive cure (overcure) is applied to a lower-layerinterlayer insulating film. Particularly, in the case where an electronbeam or an ultraviolet ray is irradiated over the entire via interlayerinsulating film to improve the adhesion between the via interlayerinsulating film 2 and the barrier insulating film 1 (FIGS. 18, 22, 23),there is a case where the influence of overcure is exerted on a wiringinterlayer insulating film 4 formed in advance as shown in FIG. 24. Asdescribed before, the penetration length of an electron beam or anultraviolet ray into an interlayer insulating film can be controlled byproperly adjusting the irradiation conditions. However, when theinterlayer insulating film is reduced in thickness following theminiaturization or the uniformity of the interlayer insulating film inthe wafer plane is degraded, the control of the penetration lengthbecomes difficult and thus the overcure to the lower layer arises as aproblem. This embodiment is a technique for reducing the influence ofthe overcure.

In the first to third embodiments, the insulating films with thecomposition of SiOCH having the pore size of 0.6 nm are mainly used asthe via and wiring interlayer insulating films. However, by applying twokinds of insulating films having different sensitivities to cure to viaand wiring interlayer insulating films, it is possible to avoid theinfluence of overcure.

TABLE 2 Low-k Chemical Composition Pore size Film Si O C H k-value (nm)A (Via 1 1.5 0.4 1.9 2.60 0.6 Interlayer Insulating Film) B (Wiring 11.1 3.2 6.2 2.45 0.4 Interlayer Insulating Film)

Table 2 shows the film properties of a film A (via interlayer insulatingfilm) and a film B (wiring interlayer insulating film) which are themost effective among insulating films examined in this invention. Thefilm A is the insulating film shown in the first to third embodiments.The film B has a feature in that, as compared with the film A, thecontent of carbon is about five times higher and the pore size issmaller. It is also a feature that SiO bonds are randomly arranged inthe film A, while, SiO bonds form six-membered rings and are bondedthrough many hydrocarbons in the film B.

FIG. 25 shows the treatment time dependence of film shrinkage ratio whenan electron beam is directly irradiated onto the surface of each of theabove two films. Clearly, the film shrinkage of the film B for thewiring interlayer insulating film is smaller and thus its sensitivity tothe electron beam is lower. FIG. 26 shows the results of evaluating theinfluence of overcure on the lower-layer film by simulating the actualwiring forming process. Herein, the film shrinkage of the lower-layerfilm (A or B) after irradiating an electron beam for 5 minutes as shownin FIG. 25 was evaluated by X-ray reflectance measurement. As describedabove, the film shrinkage of the film B is smaller when the electronbeam is directly irradiated onto the film A and the film B. Then, when abarrier insulating film is formed to 30 nm on the film A and the film Band an electron beam is irradiated from above the upper layer, thelower-layer film A shrinks by approximately 9.4%, while, the film Bhardly shrinks. Further, when a barrier insulating film (30 nm) and afilm A are formed on the film A and the film B and an electron beam isirradiated, the film shrinkage of the lowermost layer A is 7.1%. On theother hand, it is seen that when the film B is applied to the lowermostlayer, the film shrinkage hardly occurs. That is, by applying the twoinsulating films shown in Table 2 to the via and wiring interlayerinsulating films, the influence of overcure can be effectively reduced.This result was also observed in the same manner when an ultraviolet raywas irradiated. The effect of cure increases for either of the film Aand the film B as the wavelength of ultraviolet light decreases. Thewavelength is preferably 150 to 275 nm as described before and morepreferably 150 to 180 nm.

A mechanism in which the overcure is suppressed by using as the wiringinterlayer insulating film the film B with the high carbon atom contentand the small pore size is such that, as shown in FIG. 27, SiO bondsforming six-membered rings are localized through many hydrocarbons.Therefore, the distance between the adjacent SiO bonds is large and thusthe crosslinking of SiO—Si does not easily occur as compared with thefilm A. As shown in FIG. 28, the FTIR network-type SiO—Si peak intensityserving as an index of the crosslinking of SiO—Si significantlyincreases in the film A when short-wavelength UV light is irradiated.Therefore, the sensitivity to cure can be lowered as the hydrocarboncontent increases. Further, since the pore size of the film B is asextremely small as 0.4 nm, it is possible to suppress desorption ofhydrocarbons into the pores which becomes important for strengthening(SiO—Si crosslinking).

FIG. 29 shows the results of evaluating the gas desorptioncharacteristics when UV light is directly irradiated onto the film A andthe film B. By the UV cure, desorption of hydrocarbons from the films isclearly detected. Specifically, CH₃ (15 m/e) and CH₄ (16 m/e) from thefilm A and C₂H₄ from the film B are detected as main desorbed species.However, as also shown in FIG. 24, when an electron beam or anultraviolet ray is irradiated onto the via interlayer insulating film 2,the lower-layer wiring insulating film 4 is shielded from the air by thedense hard mask 5 and barrier insulating film 1. In the film A havingthe relatively large pore size, hydrocarbons are released also into thepores in the film so that the recombination of the SiO bonds occurs,while, in the film B, since the pore size is small, gas release into thepores is suppressed. Therefore, by applying to the wiring interlayerinsulating film the insulating film in which the pore size is small orthe ratio of the number of carbon atoms to the number of silicon atomsis large, it is possible to realize higher strength and higher adhesionof the via interlayer insulating film while avoiding the influence ofovercure.

With respect to the pore size and the ratio of the number of carbonatoms to the number of silicon atoms in the wiring interlayer insulatingfilm with which the effects of this invention are obtained, taking intoaccount the errors in the respective evaluation techniques, the poresize is approximately 0.5 nm or less and the ratio of the number ofcarbon atoms to the number of silicon atoms is approximately 3 or more.The material of the film contains SiO bonds, wherein the SiO structurein the film may be random. However, by having a cyclic structure such asa six-membered ring or an eight-membered ring, the SiO bonds can be morelocalized through hydrocarbons (SiO—Si crosslinking can be suppressed)and, therefore, the effects of this invention can be easily obtained.Although the wiring interlayer insulating film having the aboveproperties slightly decreases in film strength improving effect ascompared with the via interlayer insulating film A, it is possible tosufficiently achieve the effects of this invention such as the removalof the remaining etching gas on the etching opening side walls and theincrease in adhesion to the adjacent film.

From the foregoing results, by applying the insulating films havingdifferent film properties (pore size, carbon content) to the wiringinterlayer insulating film and the via interlayer insulating film, it ispossible to realize still higher reliability and performance.

INDUSTRIAL APPLICABILITY

This invention is applicable to supercomputers and digital homeappliances requiring high calculation speeds, mobile devices such asportable telephones requiring low power consumption, and so on.

1. A semiconductor device manufacturing method for manufacturing asemiconductor device having a transistor mounted in a wiring of aplural-layer structure, said method comprising: in manufacturing thesemiconductor device that is formed on a semiconductor element andcomprises a barrier insulating film, a porous interlayer insulatingfilm, a wiring, a via plug formed by embedding a metal wiring materialin a wiring trench, and a via hole formed in said porous interlayerinsulating film, irradiating an electron beam or an ultraviolet ray ontoat least a portion of said porous interlayer insulating film beforeforming an opening in said barrier insulating film.
 2. A semiconductordevice manufacturing method according to claim 1, further comprising:etching said porous interlayer insulating film to form an opening andthen irradiating an electron beam or an ultraviolet ray onto a side wallof said opening.
 3. A semiconductor device manufacturing methodaccording to claim 1, further comprising: irradiating the electron beamor the ultraviolet ray after forming a via interlayer insulating film assaid porous interlayer insulating film surrounding a side surface ofsaid via plug, after forming a wiring interlayer insulating film as saidporous interlayer insulating film surrounding a side surface of saidwiring, or after forming said via interlayer insulating film and formingsaid wiring interlayer insulating film.
 4. A semiconductor devicemanufacturing method according to claim 3, further comprising: a firstirradiation irradiating the electron beam or the ultraviolet ray afterforming said via interlayer insulating film, after forming said wiringinterlayer insulating film, or after forming said via interlayerinsulating film and forming said wiring interlayer insulating film, anda second irradiation etching said wiring interlayer insulating film andsaid via interlayer insulating film to form an opening and thenirradiating an electron beam or an ultraviolet ray onto a side wall ofsaid opening.
 5. A semiconductor device manufacturing method accordingto claim 1, wherein an arrival energy of electrons in the irradiating ofthe electron beam is 0.25 keV or more and 20 keV or less.
 6. Asemiconductor device manufacturing method according to claim 1, whereina wavelength of ultraviolet light in the irradiating of the ultravioletray is 150 nm to 275 nm.
 7. A semiconductor device manufacturing methodaccording to claim 1, wherein a temperature of a substrate of thesemiconductor device in the irradiating of the electron beam or theultraviolet ray is set to 200° C. to 450° C.
 8. A semiconductor devicemanufacturing method according to claim 1, wherein an irradiation isperformed by inclining and rotating a substrate of the semiconductordevice in the irradiating of the electron beam or the ultraviolet ray.9. A semiconductor device manufacturing method according to claim 1,wherein an insulating film, having a pore size smaller than that of avia interlayer insulating film as said porous interlayer insulating filmsurrounding a side surface of said via plug, or an insulating film inwhich a ratio of a number of carbon atoms to a number of silicon atomsis greater than that in said via interlayer insulating film, is appliedto at least a wiring interlayer insulating film as said porousinterlayer insulating film surrounding a side surface of said wiring.10. A semiconductor device manufacturing method according to claim 9,wherein said wiring interlayer insulating film has a pore size of 0.5 nmor less.
 11. A semiconductor device manufacturing method according toclaim 9, wherein the ratio of the number of carbon atoms to the numberof silicon atoms in said wiring interlayer insulating film is three ormore.
 12. A semiconductor device manufacturing method according to claim9, wherein said wiring interlayer insulating film comprises a materialcomprising cyclic SiO bonds and a hydrocarbon bonded to a side chain ofsaid cyclic SiO bonds.
 13. A semiconductor device manufacturing methodaccording to claim 12, wherein said cyclic SiO bonds form a six-memberedring or an eight-membered ring.